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Ultra High Purity Gas Purification System for Semiconductor and Chemical Processing

The gas purification device has the following functions:
  • The solvent can be dried and purified by removing moisture, oxygen and other operations
  • Low purity industrial solvents can be purified into high-purity industrial solvents
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Product Introduction

The Gas Purification system is designed for high-purity gas applications, ensuring the removal of impurities from various gases such as nitrogen, argon, and helium. This compact and ultra-high purity system can be operated manually or via PLC control, making it versatile for different industrial settings. It functions efficiently at 110V/50Hz or 220V/50Hz, ensuring reliable performance.


Product Advantage

This system offers multiple advantages, including:

  • High Purity: Effectively removes toxic and rare gases, ensuring the highest purity levels.

  • Compact Design: Space-efficient, making it suitable for various setups, including glove boxes.

  • Flexible Operation: Can be manually controlled or automated with PLC for seamless integration.

  • Regenerating Capability: Uses a regeneration gas mixture of working gas and hydrogen (5-10%) for continuous operation.


Models & Specifications


Type
Items
Mk100 Mk200 Mk300 Mk400 Mk500 Mk600
Purifier Single Double Singe Double Singe Double
Main pipe DN40 DN40 DN50 DN50 DN63 DN63
Clrcu ation capacity 90㎡/h 90㎡/h 145㎡/h 145㎡/h 180㎡/h 180㎡/h
Copper catalyst 5kg 5kg 8 kg 2x8kg 12kg 2x12kg
Molecular sieve 5kg 5 kg 8kg 2x8kg 12kg 2x12kg



Product Uses

  1. Semiconductor Manufacturing
    In semiconductor applications, the Gas Purification system ensures that inert gases like nitrogen and argon remain free from moisture and impurities, crucial for maintaining optimal conditions during production processes.

  2. Research Laboratories
    Ideal for research environments, this system provides ultra-high purity gases, enhancing experimental accuracy and reliability, especially when working with sensitive materials or processes.

  3. Chemical Processing
    In chemical manufacturing, the system effectively removes acid and toxic gases, ensuring safety and compliance with regulatory standards, while facilitating the use of gases like acetylene and chlorine.

  4. Food and Beverage Industry
    The Gas Purification system helps maintain the integrity of gases used in food packaging and processing, removing unwanted elements that could affect flavor or safety.


Product Operate Guide

To operate the Gas Purification system, follow these steps:

  1. Connect the system to your gas supply (nitrogen, argon, or helium).

  2. Select the desired control mode (manual or PLC).

  3. Ensure the regeneration gas is prepared with a hydrogen mixture (5-10%).

  4. Monitor the system via the control panel to adjust settings as necessary.

  5. Regularly check filters and replace them based on usage to maintain high purity.


FAQ

Q: What gases can be purified using this system?
A: The system is suitable for nitrogen, argon, helium, and other gases, including rare and toxic gases.

Q: Can I control the system remotely?
A: Yes, the system can be controlled manually or through a PLC for automated processes.

Q: What is the regeneration gas composed of?
A: The regeneration gas is a mixture of the working gas and hydrogen, typically at 5-10%.

Q: What are the available sizes for this system?
A: The Gas Purification system is available in multiple sizes to meet diverse operational needs.

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